Investigation and control of ultrafast laser-induced isotropic and anisotropic nanoscale-modulated index patterns in bulk fused silica

Ultrafast laser-induced refractive index changes in a-SiO2 consist, depending on the irradiation conditions, of either positive variations, voids, or regular nanoscale patterns, each of these underlying specific structural transformations. These allow for obtaining a large palette of optical functions ranging from low loss guiding to anisotropic scattering. While briefly reviewing the excitation mechanisms, we spectroscopically interrogate local electronic and structural transformations of the glass in the isotropic index zones and in the regular self-organized nanostructures, indicating bond breaking and matrix oxygen deficiency. A spatial defect segregation marks the material transformation in the different photoinscription regimes. We equally propose a method of real time control of nanogratings formation under the action of ultrashort laser pulse with variable envelopes. Application as polarizing optical devices is discussed. © 2013 Optical Society of America OCIS codes: (140.3390) Laser materials processing; (140.3440) Laser-induced breakdown; (320.2250) Femtosecond phenomena; (160.2750) Glass and other amorphous materials; (160.6030) Silica; (220.4241) Nanostructure fabrication. References and links 1. K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21, 1729–1731 (1996). 2. K. Itoh, W. Watanabe, S. Nolte, and C. Schaffer, “Ultrafast processes for bulk modification of transparent materials,” MRS Bull. 31, 620-625 (2006). 3. R. R. Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nature Phot. 2, 219225 (2008). 4. S. Nolte, M. Will, J. Burghoff, and A. Tünnermann, “Femtosecond waveguide writing: a new avenue to threedimensional integrated optics,” Appl. Phys. A: Mater. Sci. Process. 77, 109–111 (2003). 5. W. Watanabe, T. Asano, K. Yamada, K. Itoh, and J. Nishii, “Wavelength division with three-dimensional couplers fabricated by filamentation of femtosecond laser pulses,” Opt. Lett. 28, 2491-2493 (2003). 6. Y. Bellouard, A. A. Said, and P. Bado, “Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica,” Opt. Express 13, 6635–6644 (2005). 7. H. Zhang, S. M. Eaton, and P. R. Herman, “Low-loss Type II waveguide writing in fused silica with single picosecond laser pulses,” Opt. Express 14, 4826–4834 (2006). #192898 $15.00 USD Received 25 Jun 2013; revised 6 Sep 2013; accepted 7 Sep 2013; published 27 Sep 2013 (C) 2013 OSA 1 October 2013 | Vol. 3, No. 10 | DOI:10.1364/OME.3.001755 | OPTICAL MATERIALS EXPRESS 1755 8. S. Juodkazis, V. Mizeikis, and H. Misawa, “Three-dimensional microfabrication of materials by femtosecond lasers for photonics applications,” J. Appl. Phys. 106, 051101 (2009). 9. L. Sansoni, F. Sciarrino, V. Vallone, P. Mataloni, A. Crespi, R. Ramponi, and R. Osellame, “Polarization entangled state measurement on a chip,” Phys. Rev. Lett. 105, 200503 (2010). 10. A. Couairon, L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Filamentation and damage in fused silica induced by tightly focused femtosecond laser pulses,” Phys. Rev. B 71, 125435 (2005). 11. A. Saliminia, N. T. Nguyen, S. L. Chin, and R. Vallée, “The influence of self-focusing and filamentation on refractive index modifications in fused silica using intense femtosecond pulses,” Opt. Commun. 241, 529–538 (2004). 12. I. M. Burakov, N. M. Bulgakova, R. Stoian, A. Mermillod-Blondin, E. Audouard, A. Rosenfeld, A. Husakou, and I. V. Hertel, “Spatial distribution of refractive index variations induced in bulk fused silica by single ultrashort and short laser pulses,” J. Appl. Phys. 101, 043506 (2007). 13. C. Mauclair, Spatio-Temporal Ultrafast Laser Tailoring for Bulk Functionalization of Transparent Materials, PhD thesis, Jean Monnet University Saint Etienne and Free University Berlin 2010. 14. A. Mermillod-Blondin, J. Bonse, A. Rosenfeld, I. V. Hertel, Yu. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, and R. Stoian, “Dynamics of femtosecond laser induced voidlike structures in fused silica,” Appl. Phys. Lett. 94, 041911 (2009). 15. F. Quéré, S. Guizard, and Ph. Martin, “Time-resolved study of laser-induced breakdown in dielectrics,” Europhys. Lett. 56, 138-144 (2001). 16. A. Zoubir, C. Rivero, R. Grodsky, K. Richardson, M. Richardson, T. Cardinal, and M. Couzi, “Laser-induced defects in fused silica by femtosecond IR irradiation,” Phys. Rev. B 73, 224117 (2006). 17. M. Watanabe, S. Juodkazis, H. Sun, S. Matsuo, and H. Misawa, “Luminescence and defect formation by visible and near-infrared irradiation of vitreous silica,” Phys. Rev. B 60, 9959-9964 (1999). 18. W. J. Reichman, J. W. Chan, C. W. Smelser, S. J. Mihailov, and D. M. Krol, “Spectroscopic characterization of different femtosecond laser modification regimes in fused silica,” J. Opt. Soc. Am. B 24, 1627–1632 (2007). 19. D. J. Little, M. Ams, P. Dekker, G. D. Marshall, J. M. Dawes, and M. J. Withford, “Femtosecond laser modification of fused silica: the effect of writing polarization on Si-O ring structure,” Opt. Express 16, 20029–20037 (2008). 20. C. W. Ponader, J. F. Schroeder, and A. Streltsov, “Origin of the refractive-index increase in laser-written waveguides in glasses,” J. Appl. Phys. 103, 063516 (2008). 21. M. Lancry, B. Poumellec, A. Chahid-Erraji, M. Beresna, and P. G. Kazansky, “Dependence of the femtosecond laser refractive index change thresholds on the chemical composition of doped-silica glasses,” Opt. Mat. Express 1, 711–723 (2011). 22. S. Juodkazis, K. Nishimura, S. Tanaka, H. Misawa, E. G. Gamaly, B. Luther-Davies, L. Hallo, P. Nicolai, and V. T. Tikhonchuk, “Laser-induced microexplosion confined in the bulk of a sapphire crystal: evidence of multimegabar pressures,” Phys. Rev. Lett. 96, 166101 (2006). 23. M. Sakakura, M. Terazima, Y. Shimotsuma, K. Miura, and K. Hirao, “Thermal and shock induced modification inside a silica glass by focused femtosecond laser pulse,” J. Appl. Phys. 109, 023503 (2011). 24. P. G. Kazansky and Y. Shimotsuma, “Self-assembled sub-wavelength structures and form birefrigence created by femtosecond laser writing in glass: properties and applications,” J. Ceram. Soc. Japan 116, 1052–1062 (2008). 25. R. Taylor, C. Hnatovsky, and E. Simova, “Applications of femtosecond laser induced self-organized planar nanocracks inside fused silica glass,” Laser and Photon. Rev. 2, 26–46 (2008). 26. G. Cheng, K. Mishchik, C. Mauclair, E. Audouard, and R. Stoian, “Ultrafast laser photoinscription of polarization sensitive devices in bulk silica glass,” Opt. Express 17, 9515–9525 (2009). 27. K. Mishchik, G. Cheng, G. Huo, I. M. Burakov, C. Mauclair, A. Mermillod-Blondin, A. Rosenfeld, Y. Ouerdane, A. Boukenter, O. Parriaux, and R. Stoian, “Nanosize structural modifications with polarization functions in ultrafast laser irradiated bulk fused silica,” Opt. Express 18, 24809–24824 (2010). 28. J. Canning, M. Lancry, K. Cook, and B. Poumellec, “New theory of femtosecond induced changes and nanopore formation,” arXiv:1109.1084 (2011). 29. C. Mauclair, A. Mermillod-Blondin, A. Rosenfeld, I. V. Hertel, E. Audouard, I. Myiamoto, and R. Stoian, “Multipoint focusing of single ultrafast laser pulses,” J. Las. Micro. Nanoeng. 6, 239 (2011). 30. K. Mishchik, C. D’Amico, P. K. Velpula, C. Mauclair, Y Ouerdane, A. Boukenter, and R. Stoian, “Ultrafast laser-induced electronic and structural modifications in bulk fused silica,” J. Appl. Phys. (2013). 31. Y. Bellouard, E. Barthel, A. A. Said, M. Dugan, and P. Bado, “Scanning thermal microscopy and Raman analysis of bulk fused silica exposed to lowenergy femtosecond laser pulses,’ Opt. Express 16, 19520–19534 (2008). 32. K. Mishchik, Ultrafast laser-induced modification of optical glasses: a spectroscopy insight into the microscopic mechanisms, PhD thesis, Jean Monnet University Saint Etienne 2012. 33. A. Mouskeftaras, Study of the physical mechanisms involved in the femtosecond laser optical breakdown of dielectric materials, PhD thesis, Ecole Polytechnique 2013. 34. A. Mermillod-Blondin, C. Mauclair, J. Bonse, R. Stoian, E. Audouard, A. Rosenfeld, and I. V. Hertel, “Timeresolved imaging of laser-induced refractive index changes in transparent media,” Rev. Sci. Instrum. 82, 033703 (2011). #192898 $15.00 USD Received 25 Jun 2013; revised 6 Sep 2013; accepted 7 Sep 2013; published 27 Sep 2013 (C) 2013 OSA 1 October 2013 | Vol. 3, No. 10 | DOI:10.1364/OME.3.001755 | OPTICAL MATERIALS EXPRESS 1756 35. R. Stoian, M. Wollenhaupt, T. Baumert, and I. V. Hertel, Temporal Pulse Tailoring in Ultrafast Laser Manufacturing Technologies in Laser Precission Microfabrication, ed. by K. Sugioka, M. Meunier, A. Pique (Springer Verlag Heidelberg Germany, 121-144, 2010). 36. A. Mermillod-Blondin, C. Mauclair, A. Rosenfeld, J. Bonse, I. V. Hertel, E. Audouard, and R. Stoian, “Size correction in ultrafast laser processing of fused silica by temporal pulse shaping,” Appl. Phys. Lett. 93, 021921 (2008). 37. L. Englert, B. Rethfeld, L. Haag, M. Wollenhaupt, C. Sarpe-Tudoran, and T. Baumert, “Control of ionization processes in high band gap materials via tailored femtosecond pulses,” Opt. Express 15, 17855–17862 (2007). 38. C. Mauclair, M. Zamfirescu, G. Cheng, J.P. Colombier, E. Audouard, and R. Stoian, “Control of ultrafast laserinduced bulk nanogratings in fused silica via pulse time envelopes,” Opt. Express 20, 12997–13005 (2012). 39. A. M. Weiner, “Femtosecond pulse shaping using spatial light modulators,” Rev. Sci. Instrum. 71, 1929–1960 (2000). 40. C. Mauclair, G. Cheng, N. Huot, E. Audouard, A. Rosenfeld, I. V. Hertel, and R. Stoian, “Dynamic ultrafast laser spatial tailoring for parallel micromachining of photonic devices in transparent materials,” Opt. Express 17, 3531–3542 (2009). 41. V. Diez-Blanco, J. Siegel, and J. Solis, “Femtosecond laser writing of optical waveguides with controllable core size in high refractive index glass,” Appl. Phys. A: Mater. Sci. Process. 88, 239–242 (2007). 42. C. Mauclair, A. Mermillod-Blondin, S. Landon, N. Huot, A. Rosenfeld, I. V. Hertel, E. Audouard, I. Myiamoto, and R. Stoian, “Single-pulse ultrafast laser imprinting of axial dot arrays in bulk glasses,” Opt. Lett. 36, 325–327 (2011). 43. G. Cheng, C. D’Amico, X. Liu, and R. Stoian, “Large mode area waveguides with polarization functions by volume ultrafast laser photoinscription of fused silica,” Opt. Lett. 38, 1924–1926 (2013).